Driving Innovation in Semiconductor Manufacturing Process: The Success of Huvics Cleaner System
The semiconductor industry is a field constantly demanding technological innovation and quality enhancement. As fine processing technology advances, thoroughly removing tiny contaminants on wafer surfaces has become a crucial factor linked to product performance. However, many companies face challenges in selecting the optimal cleaner system during initial equipment investments. In this situation, Huvics’ cleaner system significantly contributes to improving productivity and stabilizing quality for semiconductor manufacturers with its excellent performance and efficient process management capabilities. This case study introduces the story of a customer company achieving results by implementing Huvics’ cleaner system, particularly the Spin Cleaner (Full Auto/Manual).
The client, Company A, produces high-performance semiconductor chips and was experiencing difficulties in operating the production line due to the low cleaning efficiency and frequent equipment issues of their existing cleaner system. The persistent increase in defect rates due to residual fine particles on wafer surfaces and the additional process time consumed by manual operations led to higher production costs. Moreover, the complex maintenance process of the existing system required continuous management by skilled engineers, increasing labor costs. Company A, in reviewing various cleaner systems to solve these issues, paid attention to the cleaning technology and automation features offered by Huvics’ Spin Cleaner. Particularly, the automated wafer loading/unloading system of the Full Auto type Spin Cleaner attracted interest for its ability to minimize labor input and enhance production efficiency. Moreover, the Manual type Spin Cleaner was adopted for its advantage of allowing experimental applications of various cleaning conditions during the research and development phase. Company A’s engineering team started collaborating with Huvics through technical meetings to build a cleaner system solution optimized for their production process.
Huvics analyzed Company A’s requirements and proposed a Spin Cleaner solution. By implementing the Full Auto type Spin Cleaner on the mass production line, automation of all processes such as wafer loading, unloading, cleaning, and drying minimized operator intervention and improved production speed. Additionally, the Manual type Spin Cleaner was introduced for the research and development line to support experimental applications of various cleaning agents and conditions. The core technology of Huvics’ Spin Cleaner lies in using multi-step cleaning techniques (Micro Bubble, Water Jet, Air Knife, etc.) to remove contaminant particles from wafer surfaces. Designed to secure cleaning effects by controlling process variables such as wafer rotation speed, cleaning solution spray amount, and drying temperature, Huvics’ Spin Cleaner plays a crucial role. In particular, the Oven Dry function contributes to the reduction of moisture on wafer surfaces after cleaning, thereby preventing re-contamination and enhancing the stability of subsequent processes. Moreover, considering compatibility with Company A’s existing production line, Huvics reduced the installation space of the Spin Cleaner and enhanced maintenance convenience, with modular component structures and automatic diagnostic functions acting as efficiency-boosting factors.
After implementing Huvics’ Spin Cleaner, Company A observed improvement in productivity and quality aspects. The automated process of the Full Auto type Spin Cleaner increased wafer handling capacity and provided a cost reduction effect by reducing operator intervention. Meanwhile, the Manual type Spin Cleaner has been utilized for developing new cleaning processes and improving existing ones in the research and development line. The effect of defect rate reduction was particularly noticeable. By removing fine particles on wafer surfaces, Huvics’ Spin Cleaner contributed to the reduction of defect rates, and the on-site reaction was positive. Company A’s production manager remarked:
“After implementing Huvics Spin Cleaner, the production line stability improved, and the cost reduction effect due to the decrease in defect rates was also evident. In particular, Huvics’ technical support team promptly addressed issues, helping minimize production disruptions.”
Additionally, an engineer from Company A stated:
“The wafer surface defects noticeably decreased shortly after initial usage. Significant improvements over existing equipment were observed.”
The case of implementing Huvics’ cleaner system highlights the importance of cleaner equipment in the semiconductor manufacturing process. Spin Cleaners have become essential equipment for improving product reliability by removing contaminants from wafer surfaces. Full Auto and Manual type products can be selectively applied according to the purpose and scale of the production line, providing flexible responses to corporate production strategies. Through this case study, it was confirmed that Huvics goes beyond mere equipment supply to contribute to enhancing customer business performance by providing solutions tailored to actual customer process needs. Moving forward, Huvics plans to continuously pursue strategies to improve the overall efficiency of semiconductor manufacturing processes through integrated solutions with other process equipment such as Grinder Systems and Laminator Systems.
The case with Company A is significant as it demonstrates the success Huvics achieved based on its technological capabilities and customer-centric approach. The main implications obtained through this cooperation are as follows. First, precise analysis of customer processes and understanding of demands are essential for designing customized solutions. Huvics effectively provided equipment reflecting these aspects through technical meetings with Company A. Second, innovation in cleaning process technology is directly linked to improvements in manufacturing quality. Huvics contributed to the creation of a stable process environment through multi-step cleaning technology and the Oven Dry function. Third, maintaining customer satisfaction and building trust by providing continuous technical support even after implementation is important. Huvics diligently implemented these elements by strengthening on-site response and systematizing technical support.
Huvics plans to enhance customer-tailored technology development and quality-focused equipment solutions based on this case. The key to Huvics’ technological strategy is to reflect customer needs more precisely and to secure agility in quickly responding to changes in the process environment. Helping customers secure a competitive edge in processes and stably carry out new product developments through Huvics equipment is the goal. Additionally, Huvics will continue to fulfill its role as a long-term technology partner by strengthening cooperative relationships with customers.
Leveraging the cooperation with Company A, Huvics intends to propose professional cleaner system solutions to more semiconductor manufacturers. By providing technology services and competitive products that prioritize customer satisfaction, Huvics aims to grow together with customers. Huvics will always provide the best solutions on the customer’s site and will do its utmost for the customer’s success.
For more information about the Huvics Cleaner System, please contact a Huvics representative, who will guide you in detail. Thank you.
This case highlights the importance of equipment selection in securing process stability and quality in semiconductor processes centered around advanced cleaning technology. By providing cleaner systems optimized for customers’ processing environments, Huvics has driven tangible performance improvements in the precision-required semiconductor industry.
Huvics is a high-tech company developing and manufacturing automation equipment and production systems across the semiconductor, LED, mobile, and cosmetic industries.
With top-notch personnel and continuous technological innovation, we support customers in enhancing productivity and securing quality competitiveness.
Huvics Co., Ltd. Contact Information
Phone: 031-374-8285
Email: sky@huvics.com
